Problem svgcoat SNF 2010-04-27 15:46:20: 3617m

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Apr 29 10:28:44 PDT 2010

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cleaned dispense hose  EBR nozzles belts and chuck , cycled wafers
3617 Uniformity Looks Good and back of wafers nice and clean,
cleaned Hotplate, ok to use.

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