Shutdown svgcoat SNF 2010-08-10 06:53:18: Replacing pump

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Aug 10 12:49:09 PDT 2010


Replaced the Cybor pump for 220-7 photoresist. Entered calibration data into pump controller. purged resist and checked for leaks. Checked and adjusted suckback. Test wafers are OK to marginal. More work needs to be done to improve 220-7 resist process. 220-7 resist process OK for non criticals or verify coatings with test wafers. 3612 and 3616 resist processes are up. 
  220-7 7.0 resist thickness tests( 5 spots)
    Thickness Mean: 72688 A
     Standard Dev: 60




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