Problem svgcoat SNF 2010-08-09 13:59:40: EBR back splash

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Aug 11 16:29:04 PDT 2010


Splash on backs of wafers. Suspect that the spin chuck was coming up too fast and ejecting a small droplet of EBR onto the backs of the wafers. Unable to slow down speed of spindle with adjustment valves. Dis-assembled and replaced the air cylinder for spindle positioning. Cleaned and lubed the spindle guide rods. Re-assembled and tested spindle. Adjusted for smooth operation. Checked wafer centering. Checked for backside splash back- All OK.




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