Problem svgcoat SNF 2010-08-13 10:52:18: no resist (Shipley 3612)

rschuster at snf.stanford.edu rschuster at snf.stanford.edu
Fri Aug 13 10:52:19 PDT 2010


when I wanted to use the coater, the robot for the reciever station did not move at all. This was resolved by a station reset. Now there is no resist (Shipley 3612) flowing when the wafers are on the coater. There is also no liquid for theEBR clearing.




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