Shutdown svgcoat SNF 2010-08-13 10:55:04: robot (receiver station) and resist not working
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Fri Aug 13 13:56:25 PDT 2010
Checked system and Ran Wafers, Sorry But I couldnt Duplicate the
User Problem , Cycled 4 wafers ( Recipe Program 7 , 3612 , 2mm
EBR)everything looks and is working good, ok to use.
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