Shutdown svgcoat SNF 2010-08-13 10:55:04: robot (receiver station) and resist not working

vilanova at vilanova at
Fri Aug 13 13:56:25 PDT 2010

Checked system and Ran Wafers, Sorry But I couldnt Duplicate the 
User Problem , Cycled 4 wafers ( Recipe  Program 7 , 3612 , 2mm
 EBR)everything looks and is working good, ok to use.

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