Problem svgcoat SNF 2010-08-19 10:46:21: back side EBR on 3617m

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Aug 19 11:17:01 PDT 2010


adjusted EBR dispense for 3617 Resist and cycled wafers,
Back of wafers nice and clean, ok to use. 




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