Problem svgcoat SNF 2010-08-19 21:07:12: SPR220-7 uniformity is abysmal
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Mon Aug 23 07:49:26 PDT 2010
Cleaned Exhaust system , catch cup bowl and dispense hose,
Cycled wafers and Uniformity Looks Good , I've run a lot of wafers
and Uniformity Looks Good , CLEAN THE NOZZLE AND CLOSE ALL
THE WINDOWS BEFORE YOU RUN WAFERS, ALSO IF YOU GOT
TRENCHES, HOLES IN THE WAFERS THE UNIFORMITY WILL NOT LOOK AS GOOD AS IF YOU RAN A CLEAN WAFER WITH NOTHING ON IT.
More information about the svgcoat-pcs
mailing list