Comment svgcoat SNF 2010-08-19 13:06:44: 7um

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Aug 23 07:49:32 PDT 2010


Cleaned Exhaust system , catch cup bowl and dispense hose,
Cycled wafers and Uniformity Looks Good , I've run a lot of wafers
and Uniformity Looks Good , CLEAN THE NOZZLE AND CLOSE ALL
THE WINDOWS BEFORE YOU RUN WAFERS, ALSO IF YOU GOT
 TRENCHES, HOLES IN THE WAFERS THE UNIFORMITY WILL NOT LOOK AS GOOD AS IF YOU RAN A CLEAN WAFER WITH NOTHING ON IT. 




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