From vilanova at snf.stanford.edu  Wed Dec  1 07:56:25 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 1 Dec 2010 07:56:25 -0800
Subject: Problem svgcoat SNF 2010-11-30 22:49:14: 220-7 doesn't dispense
Message-ID: <mailman.2592.1357938718.25882.svgcoat-pcs@snf.stanford.edu>

checked system and bottle level , checked  recovery waste container
checked recipe, Initialized Pump, Pump working fine and dispensing
Cycled wafers, Ok to use. 



From calarrudo at snf.stanford.edu  Wed Dec  8 17:45:35 2010
From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu)
Date: Wed, 8 Dec 2010 17:45:35 -0800
Subject: Problem svgcoat SNF 2010-12-08 17:45:35: 
Message-ID: <mailman.2593.1357938718.25882.svgcoat-pcs@snf.stanford.edu>

front track chuck won't come up.



From vilanova at snf.stanford.edu  Thu Dec  9 08:20:54 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 9 Dec 2010 08:20:54 -0800
Subject: Problem svgcoat SNF 2010-12-08 17:45:35: 
Message-ID: <mailman.2594.1357938718.25882.svgcoat-pcs@snf.stanford.edu>

Checked & cleaned  Spindle air  Solenoid , Cleaned Bubbles from
Resist Line, Cycled and cleaned dummy wafers, Cleaned Catch cup
 hotplate , belts , Checked Resist Bottles , Cycled wafers,Ok to use.-