From gsosa at snf.stanford.edu Fri Feb 5 17:10:13 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 5 Feb 2010 17:10:13 -0800 Subject: Comment svgcoat SNF 2010-02-05 17:10:12: HPO Vacuum error Message-ID: Checked and cleaned vacuum solinoid. Checked and adjustede vacuum sensor. Tested with standard program. All OK. From clee58 at snf.stanford.edu Sat Feb 6 17:21:37 2010 From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu) Date: Sat, 6 Feb 2010 17:21:37 -0800 Subject: Problem svgcoat SNF 2010-02-06 17:21:36: It did not start the track. Message-ID: It did not work at all. The track does not move. From jrgdavid at snf.stanford.edu Sat Feb 6 21:27:05 2010 From: jrgdavid at snf.stanford.edu (jrgdavid at snf.stanford.edu) Date: Sat, 6 Feb 2010 21:27:05 -0800 Subject: Shutdown svgcoat SNF 2010-02-06 21:27:04: temperature out of band Message-ID: temp 270 From vilanova at snf.stanford.edu Mon Feb 8 08:44:43 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Feb 2010 08:44:43 -0800 Subject: Shutdown svgcoat SNF 2010-02-06 21:27:04: temperature out of band Message-ID: adjusted thermocouple and cycled wafers, Ok to use. From vilanova at snf.stanford.edu Mon Feb 8 08:45:45 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Feb 2010 08:45:45 -0800 Subject: Problem svgcoat SNF 2010-02-06 17:21:36: It did not start the track. Message-ID: the system will not run if the temperature gets out of band, we ve adjusted temperature settings and thermocuple and system working fine now. From vilanova at snf.stanford.edu Mon Feb 8 08:45:55 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Feb 2010 08:45:55 -0800 Subject: Comment svgcoat SNF 2010-02-05 17:10:12: HPO Vacuum error Message-ID: cleared. From vilanova at snf.stanford.edu Mon Feb 8 09:06:38 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Feb 2010 09:06:38 -0800 Subject: Shutdown svgcoat SNF 2010-02-08 09:06:38: fixing a problem on the back track Message-ID: We are Working on a problem On the back track , in order to do that we have to turn off the iar pressure for both track, Sorry , we will let you peopl eknow when the front track will be available. From gsosa at snf.stanford.edu Mon Feb 8 10:35:58 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 8 Feb 2010 10:35:58 -0800 Subject: Shutdown svgcoat SNF 2010-02-08 09:06:38: fixing a problem on the back track Message-ID: Completed repairs on the back track. From barlian at snf.stanford.edu Mon Feb 8 16:19:24 2010 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Mon, 8 Feb 2010 16:19:24 -0800 Subject: Problem svgcoat SNF 2010-02-08 16:19:23: 10 um resist Message-ID: was not uniform at all. streaking. bubbles From vilanova at snf.stanford.edu Tue Feb 9 08:13:40 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Feb 2010 08:13:40 -0800 Subject: Problem svgcoat SNF 2010-02-08 16:19:23: 10 um resist Message-ID: cleaned dispense hose ,catch cup ,hotplate , purged line, ( Found a lot of bubbles In the line) Cleaned dummy wafers, Cycled wafers 10um With and wiithout EBR and uniformity Looks Good, Ok to use. From mahnaz at snf.stanford.edu Tue Feb 9 10:06:45 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 9 Feb 2010 10:06:45 -0800 Subject: Problem svgcoat SNF 2010-02-09 10:06:45: back side residue Message-ID: Ran some dummies and 1 um 3612 all good on 1.6 um 3612 all the wafers came out with residue on the back . it seems like incomplete back side EBR. From vilanova at snf.stanford.edu Tue Feb 9 11:12:42 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Feb 2010 11:12:42 -0800 Subject: Problem svgcoat SNF 2010-02-09 10:06:45: back side residue Message-ID: chuck was wet with some resist residues , cleaned chuck with acetone and isopropyl, cycled wafers , bottom of wafers nice and clean. ok to use. From vilanova at snf.stanford.edu Thu Feb 18 09:04:33 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 18 Feb 2010 09:04:33 -0800 Subject: Comment svgcoat SNF 2010-02-18 09:04:33: cleaned up catch cup and dummy wafers... Message-ID: cleaned up catch cup and dummy wafers... hotplates and belts, Ok to use. From jsnapp at snf.stanford.edu Tue Feb 23 20:34:09 2010 From: jsnapp at snf.stanford.edu (jsnapp at snf.stanford.edu) Date: Tue, 23 Feb 2010 20:34:09 -0800 Subject: Problem svgcoat SNF 2010-02-23 20:34:06: resist coated on hot plate Message-ID: Previous user ran dummy wafers resist down and glued them to the hot plates. I wiped and scrubbed everything with acetone, but still saw imperfect backsides (polished backside). From vilanova at snf.stanford.edu Wed Feb 24 11:47:21 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 24 Feb 2010 11:47:21 -0800 Subject: Problem svgcoat SNF 2010-02-23 20:34:06: resist coated on hot plate Message-ID: Cleaned hotplate , System has been tested , ok to use. From vilanova at snf.stanford.edu Thu Feb 25 08:56:37 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 25 Feb 2010 08:56:37 -0800 Subject: Comment svgcoat SNF 2010-02-18 09:04:33: cleaned up catch cup and dummy wafers... Message-ID: cleared. From vilanova at snf.stanford.edu Thu Feb 25 08:58:04 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 25 Feb 2010 08:58:04 -0800 Subject: Comment svgcoat SNF 2010-02-25 08:58:03: Daily MAintenance Routine Completed Message-ID: Cleaned hotplates and catch cup , Cleaned Dummy wafers Replaced Empty Resist bottle (3612) purged line and cycled wafers Cleaned Cooling Station and Belts. Ok to use.