Problem svgcoat SNF 2010-02-08 16:19:23: 10 um resist

[vilanova at snf.stanford.edu]

cleaned dispense hose ,catch cup ,hotplate ,  purged line,
 ( Found a lot of bubbles In the line)
Cleaned dummy wafers, Cycled wafers 10um With and wiithout EBR
and uniformity Looks Good, Ok to use.