Problem svgcoat SNF 2010-02-08 16:19:23: 10 um resist

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Feb 9 08:13:40 PST 2010


cleaned dispense hose ,catch cup ,hotplate ,  purged line,
 ( Found a lot of bubbles In the line)
Cleaned dummy wafers, Cycled wafers 10um With and wiithout EBR
and uniformity Looks Good, Ok to use. 




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