Problem svgcoat SNF 2010-02-09 10:06:45: back side residue

mahnaz at mahnaz at
Tue Feb 9 10:06:45 PST 2010

Ran some dummies and 1 um 3612 all good
on 1.6 um 3612 all the wafers came out with residue on the back . it seems like incomplete back side EBR.

More information about the svgcoat-pcs mailing list