Problem svgcoat SNF 2010-02-09 10:06:45: back side residue

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Tue Feb 9 10:06:45 PST 2010


Ran some dummies and 1 um 3612 all good
on 1.6 um 3612 all the wafers came out with residue on the back . it seems like incomplete back side EBR.




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