Problem svgcoat SNF 2010-02-09 10:06:45: back side residue

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Feb 9 11:12:42 PST 2010


chuck was wet with some resist residues , cleaned chuck with acetone 
and isopropyl, cycled wafers , bottom of wafers nice and clean.
ok to use.




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