Problem svgcoat SNF 2010-02-23 20:34:06: resist coated on hot plate

jsnapp at snf.stanford.edu jsnapp at snf.stanford.edu
Tue Feb 23 20:34:09 PST 2010


Previous user ran dummy wafers resist down and glued them to the hot plates.   I wiped and scrubbed everything with acetone, but still saw imperfect backsides (polished backside).




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