Comment svgcoat SNF 2010-02-25 08:58:03: Daily MAintenance Routine Completed

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Feb 25 08:58:04 PST 2010

Previous message: Problem svgcoat SNF 2010-02-23 20:34:06: resist coated on hot plate
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Cleaned hotplates and catch cup , Cleaned Dummy wafers
Replaced Empty Resist bottle (3612) purged line and cycled wafers
Cleaned Cooling Station and Belts. Ok to use.

Previous message: Problem svgcoat SNF 2010-02-23 20:34:06: resist coated on hot plate
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