From mahnaz at snf.stanford.edu Mon Jan 4 15:00:57 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 4 Jan 2010 15:00:57 -0800 Subject: Comment svgcoat SNF 2010-01-04 15:00:57: 3612 1um and 1.6 um Message-ID: Measured both thickness 1 um is 1090 A and very uniform. 1.6 um is 16600 A uniform. The 3612 suck back can be improved . From mahnaz at snf.stanford.edu Tue Jan 5 11:09:02 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 5 Jan 2010 11:09:02 -0800 Subject: Comment svgcoat SNF 2010-01-05 11:09:02: 7um thickness Message-ID: 70850A From mahnaz at snf.stanford.edu Tue Jan 5 11:13:43 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 5 Jan 2010 11:13:43 -0800 Subject: Problem svgcoat SNF 2010-01-05 11:13:42: speed boat 7um Message-ID: I cleaned nozzle with acetone and qtips and ran two sets of dummies before real wafers and they came out with speed boat and some had non uniformity in the center. Dispense looked okay and i did not see a bublle in the line. I did clean the tip with q-tips before every spin. From roopalik at snf.stanford.edu Tue Jan 5 14:34:09 2010 From: roopalik at snf.stanford.edu (roopalik at snf.stanford.edu) Date: Tue, 5 Jan 2010 14:34:09 -0800 Subject: Problem svgcoat SNF 2010-01-05 14:34:07: doesnot go from Resist Coater to HPO Message-ID: The front track svgcoat 1, wafers do not go from resist coater to HPO, had to manually bake them. From gsosa at snf.stanford.edu Tue Jan 5 15:47:59 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Jan 2010 15:47:59 -0800 Subject: Comment svgcoat SNF 2010-01-05 15:47:59: HPO Belts Message-ID: Belts on the hot plate oven not turning. Checked and replaced the belt motor. Tested with transfer program. All OK. From gsosa at snf.stanford.edu Wed Jan 6 07:40:30 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 6 Jan 2010 07:40:30 -0800 Subject: Problem svgcoat SNF 2010-01-05 14:34:07: doesnot go from Resist Coater to HPO Message-ID: Belts on the hot plate oven not turning. Checked and replaced the belt motor. Tested with transfer program. All OK. From mahnaz at snf.stanford.edu Wed Jan 6 11:24:51 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 6 Jan 2010 11:24:51 -0800 Subject: Problem svgcoat SNF 2010-01-06 11:24:50: 7um Message-ID: It has gotten much better but center speed boat still there For asml purpose the sample is not good. For sts the uniformity is good. From vilanova at snf.stanford.edu Mon Jan 11 07:10:43 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Jan 2010 07:10:43 -0800 Subject: Comment svgcoat SNF 2010-01-11 07:10:42: Found The Post bake Hotplate Full Of Resist Message-ID: Found the Hotplate Full of resist, Cleaned it and restarted the system, Ok to use. From vilanova at snf.stanford.edu Tue Jan 12 07:51:58 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 12 Jan 2010 07:51:58 -0800 Subject: Comment svgcoat SNF 2010-01-12 07:51:57: found the post bake hotplate full of resist again! Message-ID: From vilanova at snf.stanford.edu Tue Jan 12 07:52:20 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 12 Jan 2010 07:52:20 -0800 Subject: Comment svgcoat SNF 2010-01-11 07:10:42: Found The Post bake Hotplate Full Of Resist Message-ID: cleaned and tested. ok to use. From vilanova at snf.stanford.edu Tue Jan 12 07:52:33 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 12 Jan 2010 07:52:33 -0800 Subject: Comment svgcoat SNF 2010-01-12 07:51:57: found the post bake hotplate full of resist again! Message-ID: cleaned and tested , ok to use. From xzhuan1 at snf.stanford.edu Mon Jan 18 12:18:05 2010 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Mon, 18 Jan 2010 12:18:05 -0800 Subject: Problem svgcoat SNF 2010-01-18 12:18:04: track1 drain alarm Message-ID: From gsosa at snf.stanford.edu Tue Jan 19 11:24:57 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Jan 2010 11:24:57 -0800 Subject: Problem svgcoat SNF 2010-01-18 12:18:04: track1 drain alarm Message-ID: Pumped the waste to external drain tank. From mahnaz at snf.stanford.edu Tue Jan 26 12:11:32 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 26 Jan 2010 12:11:32 -0800 Subject: Comment svgcoat SNF 2010-01-26 12:11:32: 220-7 huge improvement Message-ID: Ran few wafers except one, all look good From faridz at snf.stanford.edu Tue Jan 26 12:33:58 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Tue, 26 Jan 2010 12:33:58 -0800 Subject: Problem svgcoat SNF 2010-01-26 12:33:57: prog 7 Message-ID: program 7 10um 2mm ebr given out 5mm ebr please check From vilanova at snf.stanford.edu Tue Jan 26 14:22:07 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 26 Jan 2010 14:22:07 -0800 Subject: Problem svgcoat SNF 2010-01-26 12:33:57: prog 7 Message-ID: adjusted EBR Arm Position , Cycled wafers , 2mm EBR , ok now ready to use. From lilihsu at snf.stanford.edu Wed Jan 27 15:33:58 2010 From: lilihsu at snf.stanford.edu (lilihsu at snf.stanford.edu) Date: Wed, 27 Jan 2010 15:33:58 -0800 Subject: Problem svgcoat SNF 2010-01-27 15:33:58: 7um suckback Message-ID: we cleaned the nozzle 5 times with acetone, but the 7um resist wafers still came out with streaks on them. there also seems to be a problem with the suckback. From pponce at snf.stanford.edu Thu Jan 28 20:41:35 2010 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Thu, 28 Jan 2010 20:41:35 -0800 Subject: Comment svgcoat SNF 2010-01-28 20:41:35: SPR220-7 bottle replaced Message-ID: Be sure to run dummy wafers to purge any air bubbles from the lines. From vilanova at snf.stanford.edu Fri Jan 29 09:33:26 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 29 Jan 2010 09:33:26 -0800 Subject: Comment svgcoat SNF 2010-01-28 20:41:35: SPR220-7 bottle replaced Message-ID: purged line and cycled dummy wafers Uniformity Looks Good Also I adjusted the suck back , cycled at least 3 dummy wafers before your Start your batch and dont forget to clean the dispense hose with qtips to get better uniformity results. From vilanova at snf.stanford.edu Fri Jan 29 09:33:39 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 29 Jan 2010 09:33:39 -0800 Subject: Problem svgcoat SNF 2010-01-27 15:33:58: 7um suckback Message-ID: purged line and cycled dummy wafers Uniformity Looks Good Also I adjusted the suck back , cycled at least 3 dummy wafers before your Start your batch and dont forget to clean the dispense hose with qtips to get better uniformity results. From mahnaz at snf.stanford.edu Fri Jan 29 10:25:04 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 29 Jan 2010 10:25:04 -0800 Subject: Problem svgcoat SNF 2010-01-29 10:25:01: 3617m Message-ID: a lab member reported a problem, iran some wafers and it seems that the dispense is to fast and is not controlled at all. Many spots on the samples. From mahnaz at snf.stanford.edu Fri Jan 29 10:28:20 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 29 Jan 2010 10:28:20 -0800 Subject: Comment svgcoat SNF 2010-01-29 10:28:19: 220-7 Message-ID: many bubbles in line, i noticed that the bottle was not sitting right, correct that, little bit better but still needs to be improved.