Problem svgcoat SNF 2010-01-05 11:13:42: speed boat 7um

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Tue Jan 5 11:13:43 PST 2010


I cleaned nozzle with acetone and qtips and ran two sets of dummies before real wafers and they came out with speed boat and some had non uniformity in the center.
Dispense looked okay and i did not see a bublle in the line.
I did clean the tip with q-tips before every spin.




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