Problem svgcoat SNF 2010-01-05 14:34:07: doesnot go from Resist Coater to HPO

roopalik at snf.stanford.edu roopalik at snf.stanford.edu
Tue Jan 5 14:34:09 PST 2010


The front track svgcoat 1, wafers do not go from resist coater to HPO, had to manually bake them.




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