Problem svgcoat SNF 2010-01-27 15:33:58: 7um suckback

lilihsu at snf.stanford.edu lilihsu at snf.stanford.edu
Wed Jan 27 15:33:58 PST 2010


we cleaned the nozzle 5 times with acetone, but the 7um resist wafers still came out with streaks on them.  there also seems to be a problem with the suckback.




More information about the svgcoat-pcs mailing list