Problem svgcoat SNF 2010-01-27 15:33:58: 7um suckback

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jan 29 09:33:39 PST 2010


purged line and cycled dummy wafers Uniformity Looks Good
Also I adjusted the suck back  , cycled at least 3 dummy wafers before 
your Start your batch and dont forget to clean the dispense hose with 
qtips to get better uniformity results. 




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