From gsosa at snf.stanford.edu Thu Jul 1 09:01:32 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Jul 2010 09:01:32 -0700 Subject: Comment svgcoat SNF 2010-06-19 00:51:37: bubbles in the line Message-ID: ok From gsosa at snf.stanford.edu Thu Jul 1 09:02:14 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Jul 2010 09:02:14 -0700 Subject: Comment svgcoat SNF 2010-06-22 21:13:02: bubbles in 3612 line Message-ID: Purged dispense line From vilanova at snf.stanford.edu Mon Jul 12 08:22:37 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Jul 2010 08:22:37 -0700 Subject: Comment svgcoat SNF 2010-07-12 08:22:37: EBR Nozzle Broken Message-ID: This morning while Inspecting and running the System I found the EBR nozzle Dispensing all the way to the top , I found a lot of EBR All over the catch cup wires bottom and cool plate, this is a dangerous because people might get EBR all over them if they get closer to Inspect their wafers, I DONT KNOW WHY THIS WASNT REPORT IT ON CORAL, I've replaced the broken EBR and adjusted it, Cycled wafers Uniformity Looks good and 2mm EBR looks Ok , Also ran 5mm EBR and system is also ok, ready to use. From fanzeng at snf.stanford.edu Mon Jul 12 19:11:43 2010 From: fanzeng at snf.stanford.edu (fanzeng at snf.stanford.edu) Date: Mon, 12 Jul 2010 19:11:43 -0700 Subject: Problem svgcoat SNF 2010-07-12 19:11:43: cool plate sensor problem Message-ID: Cool plate sensor doesn't work sometimes. Cannot sense the wafer and the wafer gets stuck to the receiver casette. From vilanova at snf.stanford.edu Tue Jul 13 08:18:20 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 13 Jul 2010 08:18:20 -0700 Subject: Problem svgcoat SNF 2010-07-12 19:11:43: cool plate sensor problem Message-ID: Cool plate sensor tested, cleaned catch cup hotplate and dummy wafers, cycled wafers Found the USB computer connector out of the plug, put it back in and tested, Cool plate working fine, ok to use From dwnam at snf.stanford.edu Thu Jul 15 12:01:22 2010 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Thu, 15 Jul 2010 12:01:22 -0700 Subject: Problem svgcoat SNF 2010-07-15 12:01:21: Comet Message-ID: 3 wafers with dispenser 1 1 wafer with dispenser 2 They all showed a comet on the same spot an inch from the edge. From vilanova at snf.stanford.edu Thu Jul 15 14:35:28 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 15 Jul 2010 14:35:28 -0700 Subject: Problem svgcoat SNF 2010-07-15 12:01:21: Comet Message-ID: purged and cleaned up dispense hose , cycled wafers ,Uniformity looks good, PLEASE REMEMBER TO CLOSE THE WINDOWS WHILE CYCLING THE WAFERS THIS WAY PARTICLES WILL NOT GO ON THEM CAUSING THE "COMET" EFFECT. From hongyuc at snf.stanford.edu Sat Jul 17 17:31:13 2010 From: hongyuc at snf.stanford.edu (hongyuc at snf.stanford.edu) Date: Sat, 17 Jul 2010 17:31:13 -0700 Subject: Problem svgcoat SNF 2010-07-17 17:31:12: receiver reset problem Message-ID: I found the receiver cannot be reset. From vilanova at snf.stanford.edu Mon Jul 19 08:32:19 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 19 Jul 2010 08:32:19 -0700 Subject: Problem svgcoat SNF 2010-07-17 17:31:12: receiver reset problem Message-ID: Checked system and FOund small carboy ( under the machine) full Emptied, replaced Big carboy( in the yellow cabinet) and cleaned yellow cabinet doors, Cycled wafers , cleaned dummy hotplate and catch cup, Ready to use. From gsosa at snf.stanford.edu Wed Jul 28 10:18:59 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 28 Jul 2010 10:18:59 -0700 Subject: Comment svgcoat SNF 2010-07-28 10:18:58: Dispense arm issue Message-ID: Checked and releveled the dispense arm. Checked nozzle alignment and centering-OK. Checked and adjusted EBR nozzle for 2mm EBR. Cleaned the coater bowl and belts. Also created 2 new custom resist programs as per user request. Tested system operation- All OK. From ahazeghi at snf.stanford.edu Wed Jul 28 17:59:17 2010 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Wed, 28 Jul 2010 17:59:17 -0700 Subject: Problem svgcoat SNF 2010-07-28 17:59:16: problem! problem! Message-ID: the track sensors are busted! every time wafer gets stuck at the hot plate and alarm goes off. please fix this From gsosa at snf.stanford.edu Thu Jul 29 08:40:21 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 29 Jul 2010 08:40:21 -0700 Subject: Problem svgcoat SNF 2010-07-28 17:59:16: problem! problem! Message-ID: Cycled 36 wafers through the track with no problems.Could not reproduce problem or alarms. From mahnaz at snf.stanford.edu Fri Jul 30 11:10:16 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 30 Jul 2010 11:10:16 -0700 Subject: Problem svgcoat SNF 2010-07-30 11:10:16: 220-7 extra bubble Message-ID: Ran 5 dummies , cleaned the dispense line with qtips but every other wf came out bad. Any update on the pump.