Problem svgcoat SNF 2010-07-12 19:11:43: cool plate sensor problem
fanzeng at snf.stanford.edu
fanzeng at snf.stanford.edu
Mon Jul 12 19:11:43 PDT 2010
Cool plate sensor doesn't work sometimes. Cannot sense the wafer and the wafer gets stuck to the receiver casette.
More information about the svgcoat-pcs
mailing list