Problem svgcoat SNF 2010-07-12 19:11:43: cool plate sensor problem
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Tue Jul 13 08:18:20 PDT 2010
Cool plate sensor tested, cleaned catch cup hotplate and dummy
wafers, cycled wafers Found the USB computer connector out of the
plug, put it back in and tested, Cool plate working fine, ok to use
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