Problem svgcoat SNF 2010-07-12 19:11:43: cool plate sensor problem

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jul 13 08:18:20 PDT 2010


Cool plate sensor tested, cleaned catch cup hotplate and dummy 
wafers, cycled wafers Found the USB computer connector out of the 
plug, put it back in and tested, Cool plate working fine, ok to use




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