Comment svgcoat SNF 2010-07-28 10:18:58: Dispense arm issue

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Jul 28 10:18:59 PDT 2010


Checked and releveled the dispense arm. Checked nozzle alignment and centering-OK. Checked and adjusted EBR nozzle for 2mm EBR. Cleaned the coater bowl and belts. Also created 2 new custom resist programs as per user request. Tested system operation- All OK.




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