From dton at snf.stanford.edu Tue Jun 1 16:50:09 2010 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Tue, 1 Jun 2010 16:50:09 -0700 Subject: Problem svgcoat SNF 2010-06-01 16:50:09: wafer broke inside the dispenser Message-ID: I took the large pieces out, but there is still small pieces inside the dispenser. From liangjl at snf.stanford.edu Tue Jun 1 16:51:41 2010 From: liangjl at snf.stanford.edu (liangjl at snf.stanford.edu) Date: Tue, 1 Jun 2010 16:51:41 -0700 Subject: Comment svgcoat SNF 2010-06-01 16:51:40: above problem Message-ID: use wrong accout to report the problem. It happened during my process, not dton's. From vilanova at snf.stanford.edu Wed Jun 2 07:31:53 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 2 Jun 2010 07:31:53 -0700 Subject: Problem svgcoat SNF 2010-06-01 16:50:09: wafer broke inside the dispenser Message-ID: removed broken pieces cleaned catch cup belts and hotplate + chill plate , cycled wafers , ok to use. From vilanova at snf.stanford.edu Wed Jun 2 07:31:58 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 2 Jun 2010 07:31:58 -0700 Subject: Comment svgcoat SNF 2010-06-01 16:51:40: above problem Message-ID: removed broken pieces cleaned catch cup belts and hotplate + chill plate , cycled wafers , ok to use. From mahnaz at snf.stanford.edu Wed Jun 2 09:57:09 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 2 Jun 2010 09:57:09 -0700 Subject: Shutdown svgcoat SNF 2010-06-02 09:57:09: vac. break error Message-ID: Just cleaning some dummies and wfs get stuck half way on the belt with the error mentioned above. Reset the track 3 times and still doing it. From vilanova at snf.stanford.edu Wed Jun 2 10:50:01 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 2 Jun 2010 10:50:01 -0700 Subject: Shutdown svgcoat SNF 2010-06-02 09:57:09: vac. break error Message-ID: the wafer flags stoppers were sticky because there was a big chunck of resist residues on them, cleaned with acetone and cycled wafers ( cleaned all dummies ) Ok to use. From vilanova at snf.stanford.edu Tue Jun 8 07:30:45 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 8 Jun 2010 07:30:45 -0700 Subject: Comment svgcoat SNF 2010-06-08 07:30:45: Found the hotplate Full Of Resist Message-ID: Found the hotplate Full Of Resist, CLeaned. From dkozak at snf.stanford.edu Sat Jun 19 00:51:38 2010 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Sat, 19 Jun 2010 00:51:38 -0700 Subject: Comment svgcoat SNF 2010-06-19 00:51:37: bubbles in the line Message-ID: Same as SVG Coat2 yesterday, sbgcoat1 beeps due to bubbles in the line. From jwpchen at snf.stanford.edu Tue Jun 22 21:13:03 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Tue, 22 Jun 2010 21:13:03 -0700 Subject: Comment svgcoat SNF 2010-06-22 21:13:02: bubbles in 3612 line Message-ID: often a train of not-so-tiny bubbles comes along and in 1/4 chance ruins the party, tried purging line a couple of times but didn't help, bottle isn't full but not low enough to alarm