Shutdown svgcoat SNF 2010-06-02 09:57:09: vac. break error

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Jun 2 10:50:01 PDT 2010


the wafer flags stoppers were sticky because there was a big chunck of
resist residues on them, cleaned with acetone and cycled wafers
 ( cleaned all dummies ) Ok to use. 




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