From vilanova at snf.stanford.edu Mon Nov 1 09:00:30 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 1 Nov 2010 09:00:30 -0700 Subject: Comment svgcoat SNF 2010-11-01 09:00:30: cleaned catch cup hotplates and test wafers. Message-ID: cleaned catch cup hotplates and test wafers. From mahnaz at snf.stanford.edu Tue Nov 2 10:00:59 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 2 Nov 2010 10:00:59 -0700 Subject: Problem svgcoat SNF 2010-11-02 10:00:58: 220-7 very bad uniformity Message-ID: I asked Gary to cut the the nozzel tip straight. cleaned tip and ran 10 dummies all my 4 wafers came out real bad. I have asked the vendor to be called in to help us with the poblem. From mahnaz at snf.stanford.edu Tue Nov 2 15:21:09 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 2 Nov 2010 15:21:09 -0700 Subject: Problem svgcoat SNF 2010-11-02 15:21:08: 220-7nonuniform thickness Message-ID: I ran 220-7 um , the thickness is from 7.2 um to 4.6 um depending where the bad uniformity falls on. I noticed that there are 2 to 3 air bublles that dispense at different times during the dispense. From mahnaz at snf.stanford.edu Wed Nov 3 13:55:51 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 13:55:51 -0700 Subject: Problem svgcoat SNF 2009-11-03 12:12:15: speed boat Message-ID: noted From mahnaz at snf.stanford.edu Wed Nov 3 13:56:15 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 13:56:15 -0700 Subject: Problem svgcoat SNF 2010-01-05 11:13:42: speed boat 7um Message-ID: noted From mahnaz at snf.stanford.edu Wed Nov 3 14:11:38 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 14:11:38 -0700 Subject: Problem svgcoat SNF 2010-01-06 11:24:50: 7um Message-ID: The issue still not resolved. I will clear this and report the problem again. From mahnaz at snf.stanford.edu Wed Nov 3 14:12:02 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 14:12:02 -0700 Subject: Problem svgcoat SNF 2010-05-21 14:37:35: bubbles, slow suck back Message-ID: The issue still not resolved. I will clear this and report the problem again. From mahnaz at snf.stanford.edu Wed Nov 3 14:12:18 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 14:12:18 -0700 Subject: Problem svgcoat SNF 2010-07-30 11:10:16: 220-7 extra bubble Message-ID: The issue still not resolved. I will clear this and report the problem again. From mahnaz at snf.stanford.edu Wed Nov 3 14:12:48 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 14:12:48 -0700 Subject: Comment svgcoat SNF 2010-08-10 12:49:34: 220-7 resist process Message-ID: not sure what is this? From mahnaz at snf.stanford.edu Wed Nov 3 14:13:12 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 14:13:12 -0700 Subject: Problem svgcoat SNF 2010-09-03 10:58:14: 220-7 Message-ID: The issue still not resolved. I will clear this and report the problem again. From mahnaz at snf.stanford.edu Wed Nov 3 14:13:30 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 3 Nov 2010 14:13:30 -0700 Subject: Problem svgcoat SNF 2010-09-24 11:11:14: 220-7 Message-ID: The issue still not resolved. I will clear this and report the problem again. From gsosa at snf.stanford.edu Thu Nov 4 11:45:46 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Nov 2010 11:45:46 -0700 Subject: Shutdown svgcoat SNF 2010-11-04 11:45:45: maintenance work Message-ID: Replacing the spindle assembly From gsosa at snf.stanford.edu Thu Nov 4 14:22:04 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Nov 2010 14:22:04 -0700 Subject: Shutdown svgcoat SNF 2010-11-04 11:45:45: maintenance work Message-ID: Replaced the spindle housing. Verified chuck vacuum and vacuum sensor operation. performed spindle calibration Successful spindle calibration up tho 98KRPM. Checked wafer centering and EBR width- All OK. Also replaced the spin chuck. System operation OK. From mahnaz at snf.stanford.edu Fri Nov 5 08:47:57 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 5 Nov 2010 08:47:57 -0700 Subject: Shutdown svgcoat SNF 2010-11-05 08:47:57: pico track is here Message-ID: From vilanova at snf.stanford.edu Fri Nov 5 09:29:49 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Nov 2010 09:29:49 -0700 Subject: Shutdown svgcoat SNF 2010-11-05 08:47:57: pico track is here Message-ID: Vendor WAs here to take a look at the thick resist problem Unfortunaly they couldnt spend a lot of time because they a previous appoinment at berkeley labs, We will wait for them to call us back to re scheluded a visit. From jasonlin at snf.stanford.edu Wed Nov 10 12:43:36 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Wed, 10 Nov 2010 12:43:36 -0800 Subject: Problem svgcoat SNF 2010-11-10 12:43:36: 3612 Circular pattern Message-ID: There's a circular pattern using 3612 (non uniformity?). I wrote this as a problem but it was cleared with the reason that the resist bottle was empty (but no alarm). This time I made sure the resist bottle is not empty but the pattern is still there. Would appreciate help on this. Thank you! From jasonlin at snf.stanford.edu Wed Nov 10 12:47:26 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Wed, 10 Nov 2010 12:47:26 -0800 Subject: Problem svgcoat SNF 2010-11-10 12:47:26: EBR problem Message-ID: Sorry, the EBR problem is on track 1 (please delete my problem report on track 2). Problem message is below: I used 2mm EBR but it sprayed EBR all over my wafer (program 7 1.0um 2mm EBR). From latta at snf.stanford.edu Wed Nov 10 12:49:45 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 10 Nov 2010 12:49:45 -0800 Subject: Problem svgcoat SNF 2010-11-10 12:47:26: EBR problem Message-ID: for track2 From eszilagy at snf.stanford.edu Wed Nov 10 23:39:11 2010 From: eszilagy at snf.stanford.edu (eszilagy at snf.stanford.edu) Date: Wed, 10 Nov 2010 23:39:11 -0800 Subject: Problem svgcoat SNF 2010-11-10 23:39:09: wafer not transfering Message-ID: The wafer wasn't transferred out of the sender station, and the tracks above the coater continually ran. Logged out and restarted, but saw the same behavior while trying to run program 8. Perhaps there is a simple trick that I don't know about. From gsosa at snf.stanford.edu Thu Nov 11 09:04:35 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Nov 2010 09:04:35 -0800 Subject: Problem svgcoat SNF 2010-11-10 23:39:09: wafer not transfering Message-ID: Tested track operation. All appears to be working fine. Maybe the system was in manual mode. From gsosa at snf.stanford.edu Thu Nov 11 09:05:02 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Nov 2010 09:05:02 -0800 Subject: Problem svgcoat SNF 2010-11-10 12:43:36: 3612 Circular pattern Message-ID: Wrong track From gsosa at snf.stanford.edu Fri Nov 12 09:52:46 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 12 Nov 2010 09:52:46 -0800 Subject: Shutdown svgcoat SNF 2010-11-12 09:52:45: Dispense problem Message-ID: 3612 dispense problem From gsosa at snf.stanford.edu Fri Nov 12 14:47:45 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 12 Nov 2010 14:47:45 -0800 Subject: Shutdown svgcoat SNF 2010-11-12 09:52:45: Dispense problem Message-ID: Low 3612 resist bottle. Replaced with new bottle. Could not control suckback or purge bubbles out of line. Replaced suckback valve and replumbed S/B valve input from 3 fittings to 1 fittings to reduce leak points. Still no good. Removed syphon tube and ran a solid dispense line into bottle. Still no good. Replaced the resist bottle(exp date 7/10) with a newer batch( expires in 2011). Purged in resist to remove air bubbles. suckback is steady and no bubbles. Fine tuned suckback amount. Checked spin quality - looks good. From yiwu at snf.stanford.edu Sun Nov 14 19:37:36 2010 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Sun, 14 Nov 2010 19:37:36 -0800 Subject: Comment svgcoat SNF 2010-11-14 19:37:35: track1 waste container is almost full Message-ID: better not use it anymore until the waste container gets emptied. From dton at snf.stanford.edu Sun Nov 14 23:35:29 2010 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Sun, 14 Nov 2010 23:35:29 -0800 Subject: Problem svgcoat SNF 2010-11-14 23:35:28: Track is not working Message-ID: Somehow it seemed to think the sender cassette is not there. Not sure why. From vilanova at snf.stanford.edu Mon Nov 15 07:37:42 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 15 Nov 2010 07:37:42 -0800 Subject: Problem svgcoat SNF 2010-11-14 23:35:28: Track is not working Message-ID: carboy (small container under the track ) was full,. Emptied Ok to use. From vilanova at snf.stanford.edu Mon Nov 15 07:38:09 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 15 Nov 2010 07:38:09 -0800 Subject: Comment svgcoat SNF 2010-11-14 19:37:35: track1 waste container is almost full Message-ID: Carboy Emptied From vilanova at snf.stanford.edu Mon Nov 22 08:56:28 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 22 Nov 2010 08:56:28 -0800 Subject: Comment svgcoat SNF 2010-11-22 08:56:28: cleaned dummy wafers and catch cup Message-ID: cleaned dummy wafers + catch cup . From ahazeghi at snf.stanford.edu Tue Nov 30 00:43:15 2010 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Tue, 30 Nov 2010 00:43:15 -0800 Subject: Shutdown svgcoat SNF 2010-11-30 00:43:14: wafer stuck in coater Message-ID: upstream not ready error spinner start/stop ? error wafer does not proceed From gsosa at snf.stanford.edu Tue Nov 30 09:41:43 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 30 Nov 2010 09:41:43 -0800 Subject: Shutdown svgcoat SNF 2010-11-30 00:43:14: wafer stuck in coater Message-ID: Unable to reproduce the problem. Cycled system many times with test program- All OK. From haemmerl at snf.stanford.edu Tue Nov 30 22:49:15 2010 From: haemmerl at snf.stanford.edu (haemmerl at snf.stanford.edu) Date: Tue, 30 Nov 2010 22:49:15 -0800 Subject: Problem svgcoat SNF 2010-11-30 22:49:14: 220-7 doesn't dispense Message-ID: Tried to use 220-7 but didn't want to dipense, checked resist level (level was ok) and tried to reset the track but didn't help...