Shutdown svgcoat SNF 2010-11-04 11:45:45: maintenance work

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Nov 4 14:22:04 PDT 2010


Replaced the spindle housing. Verified chuck vacuum and vacuum sensor operation. performed spindle calibration  Successful spindle calibration up tho 98KRPM. Checked wafer centering and EBR width- All OK. Also replaced the spin chuck. System operation OK.




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