Problem svgcoat SNF 2010-11-10 12:47:26: EBR problem

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Wed Nov 10 12:47:26 PST 2010


Sorry, the EBR problem is on track 1 (please delete my problem report on track 2).  Problem message is below:
I used 2mm EBR but it sprayed EBR all over my wafer (program 7 1.0um 2mm EBR).




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