Shutdown svgcoat SNF 2010-11-12 09:52:45: Dispense problem
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Fri Nov 12 09:52:46 PST 2010
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Problem svgcoat SNF 2010-11-10 23:39:09: wafer not transfering
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Shutdown svgcoat SNF 2010-11-12 09:52:45: Dispense problem
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3612 dispense problem
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Problem svgcoat SNF 2010-11-10 23:39:09: wafer not transfering
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Shutdown svgcoat SNF 2010-11-12 09:52:45: Dispense problem
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