Comment svgcoat SNF 2010-11-22 08:56:28: cleaned dummy wafers and catch cup
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Mon Nov 22 08:56:28 PST 2010
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Problem svgcoat SNF 2010-11-14 23:35:28: Track is not working
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Shutdown svgcoat SNF 2010-11-30 00:43:14: wafer stuck in coater
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cleaned dummy wafers + catch cup .
Previous message:
Problem svgcoat SNF 2010-11-14 23:35:28: Track is not working
Next message:
Shutdown svgcoat SNF 2010-11-30 00:43:14: wafer stuck in coater
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