From kibumlee at snf.stanford.edu Fri Oct 8 09:07:38 2010 From: kibumlee at snf.stanford.edu (kibumlee at snf.stanford.edu) Date: Fri, 8 Oct 2010 09:07:38 -0700 Subject: Problem svgcoat SNF 2010-10-08 09:07:37: Wafers are not loaded Message-ID: Wafers don't move from input cassette. From jcdoll at snf.stanford.edu Fri Oct 8 11:16:32 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Fri, 8 Oct 2010 11:16:32 -0700 Subject: Comment svgcoat SNF 2010-10-08 11:16:32: Wafers running (prev comment) Message-ID: User haemmerl power cycled the track and it's working now. See previous comment. From dasgupta at snf.stanford.edu Fri Oct 8 12:18:22 2010 From: dasgupta at snf.stanford.edu (dasgupta at snf.stanford.edu) Date: Fri, 8 Oct 2010 12:18:22 -0700 Subject: Problem svgcoat SNF 2010-10-08 12:18:22: sender station will not go down Message-ID: reset track, did power recycle, tried switching wafer holders in case it did not sit flat, and it still would not go down. From ludwig at snf.stanford.edu Fri Oct 8 12:33:50 2010 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Fri, 8 Oct 2010 12:33:50 -0700 Subject: Problem svgcoat SNF 2010-10-08 12:33:50: Track 1 , sender station does not work Message-ID: From jcdoll at snf.stanford.edu Fri Oct 8 13:13:41 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Fri, 8 Oct 2010 13:13:41 -0700 Subject: Comment svgcoat SNF 2010-10-08 13:13:40: 220-7 Uniformity Message-ID: Ran 7um thick 220 resist on two unpatterned wafers. Here are the thickness measurements from nanospec. Wafer 1: Center = 6.847um, Overall range = 6.847-7.257um Wafer 2: Center = 6.412um, Overall range = 6.412-7.054um Ran two test wafers followed by these two wafers. Cleaned the nozzle at the start of each wafer with a dry q-tip. Both wafers looked pretty streaky, but the main issue is that the center thickness is about half a micron less than at points about 10mm from the edge. From zzp at snf.stanford.edu Sun Oct 10 17:15:32 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 10 Oct 2010 17:15:32 -0700 Subject: Problem svgcoat SNF 2010-10-10 17:15:31: EBR wider than spec. Message-ID: used program 7, 2mm EBR twice in the past few days and both with EBR considerably wider than 2mm. From vilanova at snf.stanford.edu Mon Oct 11 08:30:13 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Oct 2010 08:30:13 -0700 Subject: Problem svgcoat SNF 2010-10-08 09:07:37: Wafers are not loaded Message-ID: Cycled wafers , Could not repeat the Users problem, I found the Hotplate ( post bake) Full of resist , Cleaned Up , Empty Carboy Cycled wafers, System working Fine, also checked EBR and Measured It , EBR is at 2mm ( ran Several Wafers, ) Ok to use. From vilanova at snf.stanford.edu Mon Oct 11 08:30:26 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Oct 2010 08:30:26 -0700 Subject: Comment svgcoat SNF 2010-10-08 11:16:32: Wafers running (prev comment) Message-ID: Cycled wafers , Could not repeat the Users problem, I found the Hotplate ( post bake) Full of resist , Cleaned Up , Empty Carboy Cycled wafers, System working Fine, also checked EBR and Measured It , EBR is at 2mm ( ran Several Wafers, ) Ok to use. From vilanova at snf.stanford.edu Mon Oct 11 08:30:34 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Oct 2010 08:30:34 -0700 Subject: Problem svgcoat SNF 2010-10-08 12:18:22: sender station will not go down Message-ID: Cycled wafers , Could not repeat the Users problem, I found the Hotplate ( post bake) Full of resist , Cleaned Up , Empty Carboy Cycled wafers, System working Fine, also checked EBR and Measured It , EBR is at 2mm ( ran Several Wafers, ) Ok to use. From vilanova at snf.stanford.edu Mon Oct 11 08:30:42 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Oct 2010 08:30:42 -0700 Subject: Problem svgcoat SNF 2010-10-08 12:33:50: Track 1 , sender station does not work Message-ID: Cycled wafers , Could not repeat the Users problem, I found the Hotplate ( post bake) Full of resist , Cleaned Up , Empty Carboy Cycled wafers, System working Fine, also checked EBR and Measured It , EBR is at 2mm ( ran Several Wafers, ) Ok to use. From vilanova at snf.stanford.edu Mon Oct 11 08:30:50 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Oct 2010 08:30:50 -0700 Subject: Problem svgcoat SNF 2010-10-10 17:15:31: EBR wider than spec. Message-ID: Cycled wafers , Could not repeat the Users problem, I found the Hotplate ( post bake) Full of resist , Cleaned Up , Empty Carboy Cycled wafers, System working Fine, also checked EBR and Measured It , EBR is at 2mm ( ran Several Wafers, ) Ok to use. From gsosa at snf.stanford.edu Thu Oct 14 07:21:36 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 14 Oct 2010 07:21:36 -0700 Subject: Shutdown svgcoat SNF 2010-10-14 07:21:35: Maintenance Work Message-ID: Working on 220-7 process From vilanova at snf.stanford.edu Thu Oct 14 14:03:56 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Oct 2010 14:03:56 -0700 Subject: Shutdown svgcoat SNF 2010-10-14 07:21:35: Maintenance Work Message-ID: Still Working On Thick Resist program...We've made some improvement But we satill need to work On it.... From mahnaz at snf.stanford.edu Fri Oct 15 10:55:41 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 15 Oct 2010 10:55:41 -0700 Subject: Problem svgcoat SNF 2010-10-15 10:55:40: 7um no good Message-ID: Gary and Mario did some final adjustment yesterday, like the exhaust line is not blocked, the tip was slightly pulled back and few other things... So this morning I cleaned the nozzle with acetone, ran 4 dummies and every time cleaned the tip before the dispense with dry q-tip. Do not look good. the uniformity / thickness in the middle and 25% of the wafer is out. The edges still shows the speed boat like around the edges. Measured the thickness and in the nonuniform area reads 4.1 um. the rest of the wafer read at 67527, 69678,65228,65470,65133A I do have to say that Gary and Mario have practically changed everything pump, valves, lines.... I will spend some serious time next week on the track and if not successful, I will bring the vendor to take a look at it. From zzp at snf.stanford.edu Fri Oct 15 11:00:30 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Fri, 15 Oct 2010 11:00:30 -0700 Subject: Problem svgcoat SNF 2010-10-15 11:00:29: EBR width uniformity problem Message-ID: last night during my run for 2 mm EBR, some wafers ended up with almost 0 mm EBR From gsosa at snf.stanford.edu Fri Oct 15 15:10:37 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 15 Oct 2010 15:10:37 -0700 Subject: Problem svgcoat SNF 2010-10-15 11:00:29: EBR width uniformity problem Message-ID: Checked EBR width and adjusted to 2mm. From mahnaz at snf.stanford.edu Mon Oct 18 10:21:41 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 18 Oct 2010 10:21:41 -0700 Subject: Problem svgcoat SNF 2010-10-18 10:21:40: 3617m not uniform Message-ID: suck back is not good. From vilanova at snf.stanford.edu Wed Oct 20 08:09:00 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 20 Oct 2010 08:09:00 -0700 Subject: Problem svgcoat SNF 2010-10-18 10:21:40: 3617m not uniform Message-ID: adjusted suck back . From jcdoll at snf.stanford.edu Sat Oct 23 17:45:00 2010 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sat, 23 Oct 2010 17:45:00 -0700 Subject: Problem svgcoat SNF 2010-10-23 17:44:59: no ebr liquid coming out Message-ID: ebr on track 1 seems to be out From vilanova at snf.stanford.edu Mon Oct 25 09:00:54 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 25 Oct 2010 09:00:54 -0700 Subject: Problem svgcoat SNF 2010-10-23 17:44:59: no ebr liquid coming out Message-ID: Noticed that someone Ran the system with an empty resist bottle , Replaced Resist bottle ( 3612) cleaned hotplates and checked EBR system ( EBR working Fine ) THE EBR was not Probably Dispensing because the system got confused due to the resist bottle been empty power reset Once and system started to work Fine, cleaned wafers ok to use. From gsosa at snf.stanford.edu Mon Oct 25 15:40:29 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 25 Oct 2010 15:40:29 -0700 Subject: Problem svgcoat SNF 2010-10-25 15:40:28: 3612 process down 10/25 Message-ID: 3612 resist process is down. Suckback is inconsistent and uncontrollable. Need further troubleshooting and repair. From gsosa at snf.stanford.edu Tue Oct 26 15:45:01 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 26 Oct 2010 15:45:01 -0700 Subject: Problem svgcoat SNF 2010-10-25 15:40:28: 3612 process down 10/25 Message-ID: Reduced pump stroke and speed. Adjusted suckback. Checked dispense timing with arm motion. Checked and adjusted EBR to 2mm. Checked spin quality and thickness- OK 1.0 Micron- Mean: 10141A, Std Dev: 16 A