From mahnaz at snf.stanford.edu Fri Sep 3 10:55:14 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 3 Sep 2010 10:55:14 -0700 Subject: Comment svgcoat SNF 2010-09-03 10:55:14: ran 3612 1 um perfect Message-ID: From mahnaz at snf.stanford.edu Fri Sep 3 10:58:15 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 3 Sep 2010 10:58:15 -0700 Subject: Problem svgcoat SNF 2010-09-03 10:58:14: 220-7 Message-ID: ran 7 um, the issue with non uniformity stil there. Too much dispense in the middle, the puddle does not help and causes a bubble and that bubble is the source of the problem. i measured the thickness on the non uniform area nd about 4000a less in thickness. From mahnaz at snf.stanford.edu Tue Sep 14 10:21:29 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 14 Sep 2010 10:21:29 -0700 Subject: Problem svgcoat SNF 2010-09-14 10:21:29: huage bubble in 3612 line Message-ID: user wafers came out bad , when the suck back happenes, it takes too much and creates a huage bubble. From wslee at snf.stanford.edu Tue Sep 14 15:03:18 2010 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 14 Sep 2010 15:03:18 -0700 Subject: Problem svgcoat SNF 2010-09-14 15:03:18: 3612. 1um, 2mm EBR Message-ID: After each wafer, a small drop remained at the end of the resist tube that had to be cleared each time. One wafer (of 10) had the drop land on the wafer during the EBR step. Be careful. From vilanova at snf.stanford.edu Wed Sep 15 08:54:09 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 15 Sep 2010 08:54:09 -0700 Subject: Shutdown svgcoat SNF 2010-09-15 08:54:09: working on dispense + Suck back Issues. Message-ID: From vilanova at snf.stanford.edu Wed Sep 15 10:31:15 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 15 Sep 2010 10:31:15 -0700 Subject: Shutdown svgcoat SNF 2010-09-15 08:54:09: working on dispense + Suck back Issues. Message-ID: Replaced + adjusted suck back valve and fittings , Tested ok ready to use From vilanova at snf.stanford.edu Wed Sep 15 10:31:21 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 15 Sep 2010 10:31:21 -0700 Subject: Problem svgcoat SNF 2010-09-14 15:03:18: 3612. 1um, 2mm EBR Message-ID: Replaced + adjusted suck back valve and fittings , Tested ok ready to use From vilanova at snf.stanford.edu Wed Sep 15 10:31:27 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 15 Sep 2010 10:31:27 -0700 Subject: Problem svgcoat SNF 2010-09-14 10:21:29: huage bubble in 3612 line Message-ID: Replaced + adjusted suck back valve and fittings , Tested ok ready to use From narii at snf.stanford.edu Sat Sep 18 01:07:36 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 18 Sep 2010 01:07:36 -0700 Subject: Problem svgcoat SNF 2010-09-18 01:07:35: control screen gone black Message-ID: Control screen displays nothing. From jwpchen at snf.stanford.edu Sat Sep 18 11:27:07 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Sat, 18 Sep 2010 11:27:07 -0700 Subject: Comment svgcoat SNF 2010-09-18 11:27:07: display now on Message-ID: likely somebody tripped over the power cable for the monitor, plugged that back in and now it works From maxms at snf.stanford.edu Sun Sep 19 18:16:01 2010 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 19 Sep 2010 18:16:01 -0700 Subject: Problem svgcoat SNF 2010-09-19 18:16:00: chuck is at bottom Message-ID: chuck is always down in resist coat bowl From ahazeghi at snf.stanford.edu Sun Sep 19 19:51:23 2010 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Sun, 19 Sep 2010 19:51:23 -0700 Subject: Shutdown svgcoat SNF 2010-09-19 19:51:22: coater station tracks and chuck are stuck Message-ID: coater tracks and chuck are stuck. From gsosa at snf.stanford.edu Mon Sep 20 08:14:54 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 20 Sep 2010 08:14:54 -0700 Subject: Shutdown svgcoat SNF 2010-09-19 19:51:22: coater station tracks and chuck are stuck Message-ID: Checked and found controller power off. Pressed the power button and track powered up and completed hardware reset. Cycled wafers through the system- All tested OK. Cleaned track, coater bowl and dummy wafers. All OK From gsosa at snf.stanford.edu Mon Sep 20 08:15:38 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 20 Sep 2010 08:15:38 -0700 Subject: Problem svgcoat SNF 2010-09-19 18:16:00: chuck is at bottom Message-ID: Checked and found controller power off. Pressed the power button and track powered up and completed hardware reset. Cycled wafers through the system- All tested OK. Cleaned track, coater bowl and dummy wafers. All OK From gsosa at snf.stanford.edu Mon Sep 20 08:16:01 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 20 Sep 2010 08:16:01 -0700 Subject: Problem svgcoat SNF 2010-09-18 01:07:35: control screen gone black Message-ID: likely somebody tripped over the power cable for the monitor, plugged that back in and now it works From vilanova at snf.stanford.edu Mon Sep 20 11:24:58 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Sep 2010 11:24:58 -0700 Subject: Shutdown svgcoat SNF 2010-09-20 11:24:57: down for maintenance...... Message-ID: From gsosa at snf.stanford.edu Mon Sep 20 14:33:31 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 20 Sep 2010 14:33:31 -0700 Subject: Shutdown svgcoat SNF 2010-09-20 14:33:30: Shutdown-EBR Leak Message-ID: Track is still shut down. The top EBR is not working and there is an EBR leak at the monifold. Still need to track down and repair the leak. Will continue in the morning due to heavy solvent odors. The leak has been cleaned up. EBR canister is depressurized as a precaution. From vilanova at snf.stanford.edu Tue Sep 21 14:06:07 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Sep 2010 14:06:07 -0700 Subject: Shutdown svgcoat SNF 2010-09-20 14:33:30: Shutdown-EBR Leak Message-ID: Repaired EBR Leak , Replaced EBR Solenoid and EBR Dispense Tip Needle, Cycled wafers , Ok to use. From vilanova at snf.stanford.edu Tue Sep 21 14:06:13 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Sep 2010 14:06:13 -0700 Subject: Shutdown svgcoat SNF 2010-09-20 11:24:57: down for maintenance...... Message-ID: Repaired EBR Leak , Replaced EBR Solenoid and EBR Dispense Tip Needle, Cycled wafers , Ok to use. From vilanova at snf.stanford.edu Tue Sep 21 14:06:21 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Sep 2010 14:06:21 -0700 Subject: Comment svgcoat SNF 2010-09-18 11:27:07: display now on Message-ID: Repaired EBR Leak , Replaced EBR Solenoid and EBR Dispense Tip Needle, Cycled wafers , Ok to use. From mahnaz at snf.stanford.edu Fri Sep 24 11:11:14 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 24 Sep 2010 11:11:14 -0700 Subject: Problem svgcoat SNF 2010-09-24 11:11:14: 220-7 Message-ID: some improvment has been made but still needs work. Ran both 7 and 10 um and the result is very inconsistent. 10 um being very bad. I suggest that flow after the initial dispense to be controled. half way the dispense speed pickes up and causes the nonuniformity. From gsosa at snf.stanford.edu Thu Sep 30 09:08:53 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 30 Sep 2010 09:08:53 -0700 Subject: Shutdown svgcoat SNF 2010-09-30 09:08:52: Maintenance working on tool Message-ID: From gsosa at snf.stanford.edu Thu Sep 30 11:46:21 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 30 Sep 2010 11:46:21 -0700 Subject: Shutdown svgcoat SNF 2010-09-30 09:08:52: Maintenance working on tool Message-ID: Completed work. Replaced the coater cup. Rotated exhaust port located underneath the coater cup for easy access to the exhaust dampener. Tested track operation- All OK.