Problem svgcoat SNF 2010-09-14 15:03:18: 3612. 1um, 2mm EBR
wslee at snf.stanford.edu
wslee at snf.stanford.edu
Tue Sep 14 15:03:18 PDT 2010
After each wafer, a small drop remained at the end of the resist tube that had to be cleared each time. One wafer (of 10) had the drop land on the wafer during the EBR step. Be careful.
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