Problem svgcoat SNF 2010-09-14 15:03:18: 3612. 1um, 2mm EBR

wslee at snf.stanford.edu wslee at snf.stanford.edu
Tue Sep 14 15:03:18 PDT 2010


After each wafer, a small drop remained at the end of the resist tube that had to be cleared each time.  One wafer (of 10) had the drop land on the wafer during the EBR step.  Be careful.




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