Shutdown svgcoat SNF 2010-09-19 19:51:22: coater station tracks and chuck are stuck

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Sep 20 08:14:54 PDT 2010


Checked and found controller power off. Pressed the power button and track powered up and completed hardware reset. Cycled wafers through the system- All tested OK. Cleaned track, coater bowl  and dummy wafers. All OK  




More information about the svgcoat-pcs mailing list