Problem svgcoat SNF 2010-09-19 18:16:00: chuck is at bottom

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Sep 20 08:15:38 PDT 2010


Checked and found controller power off. Pressed the power button and track powered up and completed hardware reset. Cycled wafers through the system- All tested OK. Cleaned track, coater bowl  and dummy wafers. All OK  




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