Shutdown svgcoat SNF 2010-09-20 14:33:30: Shutdown-EBR Leak

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Sep 21 14:06:07 PDT 2010


Repaired EBR Leak , Replaced EBR Solenoid and EBR Dispense Tip Needle, Cycled wafers , Ok to use. 




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