Shutdown svgcoat SNF 2010-09-20 11:24:57: down for maintenance......

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Sep 21 14:06:13 PDT 2010

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Repaired EBR Leak , Replaced EBR Solenoid and EBR Dispense Tip Needle, Cycled wafers , Ok to use.

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