From gsosa at snf.stanford.edu Tue Apr 5 07:04:59 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Apr 2011 07:04:59 -0700 Subject: Shutdown svgcoat SNF 2011-04-05 07:04:58: Spindle noise Message-ID: Spindle making noise at high RPM. Will rebuild Spindle. From gsosa at snf.stanford.edu Tue Apr 5 15:33:07 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 5 Apr 2011 15:33:07 -0700 Subject: Shutdown svgcoat SNF 2011-04-05 07:04:58: Spindle noise Message-ID: Replaced spindle motor. Removed and rebuilt spindle assembly. Re-assembled. Tested spindle-All OK. Spindle calibrated to 9.9KRPM's. Checked track operation- All OK. Checked bavkside and frontside EBR- OK. From mahnaz at snf.stanford.edu Wed Apr 6 09:08:11 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 6 Apr 2011 09:08:11 -0700 Subject: Shutdown svgcoat SNF 2011-04-06 09:08:10: wafer centering is off Message-ID: Gary and Mario have been working on it before I shut it down. From gsosa at snf.stanford.edu Wed Apr 6 10:06:25 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 6 Apr 2011 10:06:25 -0700 Subject: Shutdown svgcoat SNF 2011-04-06 09:08:10: wafer centering is off Message-ID: Checked and adjusted chuck top position height (too low). Adjusted chuck position sensor flag. Checked and adjusted wafer centering. Checked and adjusted EBR width to 2mm on standard recipe. From gsosa at snf.stanford.edu Mon Apr 11 08:20:22 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 11 Apr 2011 08:20:22 -0700 Subject: Shutdown svgcoat SNF 2011-04-11 08:20:22: Scheduled downtime Message-ID: From gsosa at snf.stanford.edu Mon Apr 11 12:08:45 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 11 Apr 2011 12:08:45 -0700 Subject: Shutdown svgcoat SNF 2011-04-11 08:20:22: Scheduled downtime Message-ID: Completed scheduled work. From mahnaz at snf.stanford.edu Mon Apr 11 14:41:12 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 11 Apr 2011 14:41:12 -0700 Subject: Problem svgcoat SNF 2011-04-11 14:41:11: 7 um down Message-ID: Not sure what is happening but arm prog. has changed and drifted a great deal???? From gsosa at snf.stanford.edu Mon Apr 11 15:54:14 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 11 Apr 2011 15:54:14 -0700 Subject: Problem svgcoat SNF 2011-04-11 14:41:11: 7 um down Message-ID: Did not save some of the experimental programs correctly. Checked and corrected the programs. Also took the experimental programs offline so that they cannot be used accidentally. From gsosa at snf.stanford.edu Wed Apr 13 07:42:26 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 13 Apr 2011 07:42:26 -0700 Subject: Shutdown svgcoat SNF 2011-04-13 07:42:26: Scheduled downtime 4/13 Message-ID: Scheduled downtime to work on thick resist process From gsosa at snf.stanford.edu Wed Apr 13 12:13:40 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 13 Apr 2011 12:13:40 -0700 Subject: Shutdown svgcoat SNF 2011-04-13 07:42:26: Scheduled downtime 4/13 Message-ID: Completed scheduled work From mahnaz at snf.stanford.edu Thu Apr 14 11:16:53 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 14 Apr 2011 11:16:53 -0700 Subject: Comment svgcoat SNF 2011-04-14 11:16:53: 220-7 quick up date Message-ID: We will send out an email about Monday and WED work this morning after Mario worked on it more he asked me to check, I ran 5 dummies cleaned the nozzel and used q-tip between each wafer. looks much better but still not there. I ran 6 more wafers s and looked at the last two and not there. saved the wafers for Mario and Gary to look at. From jparker at snf.stanford.edu Thu Apr 14 17:13:14 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Thu, 14 Apr 2011 17:13:14 -0700 Subject: Problem svgcoat SNF 2011-04-14 17:13:13: EBR too small Message-ID: 5mm EBR comes out as 2mm. Seen using programs with arm position 7 in 2 programs: the 3612 1um 5mm EBR program and the "5mm EBR only" one. The 2mm EBR is also closer to 1mm. From gsosa at snf.stanford.edu Fri Apr 15 11:16:58 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 15 Apr 2011 11:16:58 -0700 Subject: Problem svgcoat SNF 2011-04-14 17:13:13: EBR too small Message-ID: Checked and adjusted 2mm EBR width. Checked 5mm EBR and adjusted to 5mm EBR. From jparker at snf.stanford.edu Tue Apr 19 20:44:56 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 19 Apr 2011 20:44:56 -0700 Subject: Shutdown svgcoat SNF 2011-04-19 20:44:55: VP controller does not stay on Message-ID: Software reset of track does not work. User made some mistakes and tried to power cycle using hardware buttons on the track. Holding down power button of VP station seems to allow it to turn on, but as soon as you let go, the VP controller turns off again. "Controller fails" displayed on software. From gsosa at snf.stanford.edu Wed Apr 20 14:26:29 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 20 Apr 2011 14:26:29 -0700 Subject: Shutdown svgcoat SNF 2011-04-19 20:44:55: VP controller does not stay on Message-ID: Determined that the power switch on the controller would not latch sometimes. Replaced the power switch and tested- OK now. Tested track operation. System running OK. From jasmine at snf.stanford.edu Thu Apr 21 14:03:52 2011 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Thu, 21 Apr 2011 14:03:52 -0700 Subject: Comment svgcoat SNF 2011-04-21 14:03:52: Message-ID: The work that the litho team did to improve the 7um on svg1 , is wonderful. Well done!! From gsosa at snf.stanford.edu Fri Apr 22 11:00:27 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 22 Apr 2011 11:00:27 -0700 Subject: Shutdown svgcoat SNF 2011-04-22 11:00:26: Scheduled Downtime Message-ID: From gsosa at snf.stanford.edu Fri Apr 22 13:19:39 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 22 Apr 2011 13:19:39 -0700 Subject: Shutdown svgcoat SNF 2011-04-22 11:00:26: Scheduled Downtime Message-ID: Completed scheduled work From zguo at snf.stanford.edu Tue Apr 26 10:38:09 2011 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Tue, 26 Apr 2011 10:38:09 -0700 Subject: Problem svgcoat SNF 2011-04-26 10:38:09: 4 10um wo/vp 2mm ebr 100s bake Message-ID: photo resist does not come out at all From zguo at snf.stanford.edu Tue Apr 26 10:38:38 2011 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Tue, 26 Apr 2011 10:38:38 -0700 Subject: Shutdown svgcoat SNF 2011-04-26 10:38:37: 10 um photo resist does not come out Message-ID: From mahnaz at snf.stanford.edu Tue Apr 26 10:54:23 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 26 Apr 2011 10:54:23 -0700 Subject: Shutdown svgcoat SNF 2011-04-26 10:38:37: 10 um photo resist does not come out Message-ID: Needed to be reset and is working fine. From mahnaz at snf.stanford.edu Tue Apr 26 10:55:10 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 26 Apr 2011 10:55:10 -0700 Subject: Problem svgcoat SNF 2011-04-26 10:38:09: 4 10um wo/vp 2mm ebr 100s bake Message-ID: system reset, working. From lilihsu at snf.stanford.edu Tue Apr 26 17:10:45 2011 From: lilihsu at snf.stanford.edu (lilihsu at snf.stanford.edu) Date: Tue, 26 Apr 2011 17:10:45 -0700 Subject: Problem svgcoat SNF 2011-04-26 17:10:44: trk carriage home? alarm Message-ID: an alarm labeled as trk carriage home? on the computer keeps going off after the wafer has been lifted out of the spin coater and before the side arms come in to start the transfer to the hotplate. I can find nothing wrong, and after clearing the alarm and hitting start once more every thing proceedes normally without incident. From lilihsu at snf.stanford.edu Tue Apr 26 17:36:02 2011 From: lilihsu at snf.stanford.edu (lilihsu at snf.stanford.edu) Date: Tue, 26 Apr 2011 17:36:02 -0700 Subject: Comment svgcoat SNF 2011-04-26 17:36:02: Thickness/uniformity Check Message-ID: 1um 3612-- average 10101A, std dev 12 Top:10090 Center:10088 Flat:10114 Left: 10109 Right: 10104 1.6um 3612-- average 16790A, std dev 25 Top:16752 Center: 16799 Flat: 16796 Left: 16819 Right: 16785 From vilanova at snf.stanford.edu Wed Apr 27 11:13:49 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 27 Apr 2011 11:13:49 -0700 Subject: Problem svgcoat SNF 2011-04-26 17:10:44: trk carriage home? alarm Message-ID: TESTED SYSTEM , COULDNT REPEAT THE PROBLEM , OK TO USE From jasmine at snf.stanford.edu Fri Apr 29 23:33:03 2011 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Fri, 29 Apr 2011 23:33:03 -0700 Subject: Problem svgcoat SNF 2011-04-29 23:33:02: svg track deosn't work Message-ID: Track 1 is down, the wafer transfer tracks do not work on the coater or bake. Please fix From jasmine at snf.stanford.edu Sat Apr 30 19:47:34 2011 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Sat, 30 Apr 2011 19:47:34 -0700 Subject: Shutdown svgcoat SNF 2011-04-30 19:47:34: Message-ID: From gsosa at snf.stanford.edu Sat Apr 30 21:09:23 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 30 Apr 2011 21:09:23 -0700 Subject: Problem svgcoat SNF 2011-04-29 23:33:02: svg track deosn't work Message-ID: Pnuematic functions not working on coater module or bakeplate module. Checked and found blown fuse for 24 volt solinoids. Replaced fuse. Reset the track and tested operation. All working normally again, From gsosa at snf.stanford.edu Sat Apr 30 21:09:29 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 30 Apr 2011 21:09:29 -0700 Subject: Shutdown svgcoat SNF 2011-04-30 19:47:34: Message-ID: Pnuematic functions not working on coater module or bakeplate module. Checked and found blown fuse for 24 volt solinoids. Replaced fuse. Reset the track and tested operation. All working normally again,