Shutdown svgcoat SNF 2011-04-06 09:08:10: wafer centering is off

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Apr 6 10:06:25 PDT 2011


Checked and adjusted chuck top position height (too low). Adjusted chuck position sensor flag. Checked and adjusted wafer centering. Checked and adjusted EBR width to 2mm on standard recipe.




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