Problem svgcoat SNF 2011-04-26 17:10:44: trk carriage home? alarm

lilihsu at snf.stanford.edu lilihsu at snf.stanford.edu
Tue Apr 26 17:10:45 PDT 2011


an alarm labeled as trk carriage home? on the computer keeps going off after the wafer has been lifted out of the spin coater and before the side arms come in to start the transfer to the hotplate.  I can find nothing wrong, and after clearing the alarm and hitting start once more every thing proceedes normally without incident.




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