From vilanova at snf.stanford.edu Wed Aug 3 08:41:06 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 3 Aug 2011 08:41:06 -0700 Subject: Comment svgcoat SNF 2011-08-03 08:41:06: cleaned Catch cup Belts hotplate Dummy wafers Message-ID: cleaned Catch cup Belts hotplate Dummy wafers. From zpatel at snf.stanford.edu Wed Aug 3 16:59:46 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Wed, 3 Aug 2011 16:59:46 -0700 Subject: Problem svgcoat SNF 2011-08-03 16:59:45: hot plate had photoresist ring Message-ID: From zpatel at snf.stanford.edu Wed Aug 3 17:37:55 2011 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Wed, 3 Aug 2011 17:37:55 -0700 Subject: Problem svgcoat SNF 2011-08-03 17:37:55: SPR-220-7 7um has streaks and particles Message-ID: Ran 5 dummies + 7 wafers All wafer have streaks and 1 or more particle From gsosa at snf.stanford.edu Thu Aug 4 09:23:09 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 09:23:09 -0700 Subject: Problem svgcoat SNF 2011-08-03 16:59:45: hot plate had photoresist ring Message-ID: Cleaned hotplate From gsosa at snf.stanford.edu Thu Aug 4 09:24:56 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 4 Aug 2011 09:24:56 -0700 Subject: Problem svgcoat SNF 2011-08-03 17:37:55: SPR-220-7 7um has streaks and particles Message-ID: Checked and adjusted suckback amount and rate. Cleaned the nozzle . Purged resist line. Tested standard 7.0um process on clean bare silicon wafers. Looks good. From ylyang at snf.stanford.edu Thu Aug 4 12:56:44 2011 From: ylyang at snf.stanford.edu (ylyang at snf.stanford.edu) Date: Thu, 4 Aug 2011 12:56:44 -0700 Subject: Problem svgcoat SNF 2011-08-04 12:56:43: program stops Message-ID: when mlpipes processed her wafers, the receiver cassette did not go down and the coated wafer could go to the cassette. We removed the wafers and tried to reset the track before we process again, then the "track card page panel" window came out and the program stops. Sorry for that, and soyy to mlpipes From vilanova at snf.stanford.edu Thu Aug 4 13:49:05 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Aug 2011 13:49:05 -0700 Subject: Problem svgcoat SNF 2011-08-04 12:56:43: program stops Message-ID: If buttons are pushed too many times On the PC wi ll freeze and system will not let you do anything. Reinitialized PC and tested, Ok to use. From carterlin at snf.stanford.edu Thu Aug 4 22:02:45 2011 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Thu, 4 Aug 2011 22:02:45 -0700 Subject: Shutdown svgcoat SNF 2011-08-04 22:02:45: dropped 2 pieces inside spincoater chamber Message-ID: accidentally dropped 2 pieces in main spincoater chamber. they are 2 cm x 2cm square quartz. please recover them, important for my process thank you carter From eperalta at snf.stanford.edu Fri Aug 5 01:01:18 2011 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Fri, 5 Aug 2011 01:01:18 -0700 Subject: Comment svgcoat SNF 2011-08-05 01:01:17: regarding shutdown Message-ID: svgcoat operating procedures/restrictions clearly state: "4 INCH WAFERS ONLY, NO PIECES" !!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!! From gsosa at snf.stanford.edu Fri Aug 5 09:26:00 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 5 Aug 2011 09:26:00 -0700 Subject: Comment svgcoat SNF 2011-08-05 01:01:17: regarding shutdown Message-ID: Retrieved users 2 quartz substrates from the coater bowl. Set pieces aside in small quartz beaker. Cleaned coater bowl. Tested track operation- All working normally. From gsosa at snf.stanford.edu Fri Aug 5 09:26:35 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 5 Aug 2011 09:26:35 -0700 Subject: Shutdown svgcoat SNF 2011-08-04 22:02:45: dropped 2 pieces inside spincoater chamber Message-ID: Retrieved users 2 quartz substrates from the coater bowl. Set pieces aside in small quartz beaker. Cleaned coater bowl. Tested track operation- All working normally. From mtan at snf.stanford.edu Sat Aug 13 14:47:00 2011 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sat, 13 Aug 2011 14:47:00 -0700 Subject: Problem svgcoat SNF 2011-08-13 14:47:00: spindle does not work Message-ID: keep getting the spindle on top? error. It appears that spindles for both coater 1 and 2 have the same problem. Cannot get the coating process started. From dton at snf.stanford.edu Sat Aug 13 15:42:24 2011 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Sat, 13 Aug 2011 15:42:24 -0700 Subject: Problem svgcoat SNF 2011-08-13 15:42:23: Temperature out of range error Message-ID: The hot plate temperature is jumping a lot. From gsosa at snf.stanford.edu Mon Aug 15 06:58:18 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 15 Aug 2011 06:58:18 -0700 Subject: Problem svgcoat SNF 2011-08-13 14:47:00: spindle does not work Message-ID: This is the error displayed when the tool is not enabled. From gsosa at snf.stanford.edu Mon Aug 15 09:47:21 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 15 Aug 2011 09:47:21 -0700 Subject: Problem svgcoat SNF 2011-08-13 15:42:23: Temperature out of range error Message-ID: Checked the terminal connections on TC plug. Replaced the thermocouple. Checked and calibrated hotplate temperature to 90 degrees C. From mahnaz at snf.stanford.edu Tue Aug 23 10:36:35 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 23 Aug 2011 10:36:35 -0700 Subject: Comment svgcoat SNF 2011-08-23 10:36:34: cleaned all the dummies Message-ID: From zguo at snf.stanford.edu Wed Aug 24 22:08:11 2011 From: zguo at snf.stanford.edu (zguo at snf.stanford.edu) Date: Wed, 24 Aug 2011 22:08:11 -0700 Subject: Problem svgcoat SNF 2011-08-24 22:08:10: send station does not move Message-ID: From cktee at snf.stanford.edu Wed Aug 24 22:59:43 2011 From: cktee at snf.stanford.edu (cktee at snf.stanford.edu) Date: Wed, 24 Aug 2011 22:59:43 -0700 Subject: Comment svgcoat SNF 2011-08-24 22:59:43: spr220 resist not dispensing properly Message-ID: Running program 6 with 7um SPR220-3 resist don't give uniform coat. The line appears to be running out of the resist. please help. From cktee at snf.stanford.edu Wed Aug 24 23:01:10 2011 From: cktee at snf.stanford.edu (cktee at snf.stanford.edu) Date: Wed, 24 Aug 2011 23:01:10 -0700 Subject: Problem svgcoat SNF 2011-08-24 23:01:10: spr220 resist line appears to be out of resist Message-ID: running program #6 7um resist does not produce good films. the line appears to be running out of the resist during dispensing. From vilanova at snf.stanford.edu Thu Aug 25 09:13:31 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 25 Aug 2011 09:13:31 -0700 Subject: Problem svgcoat SNF 2011-08-24 22:08:10: send station does not move Message-ID: 1) Send station Working Fine, The Small Waste container Under the machine was almost full . Emptied and test Operation, Ok. 2) Thick Resist (220-7) Bottle was totally empty and someone Just turned Off the Alarm Instead of replacing it with a fresh One Therefore Uniformity was BAD, Replaced Bottle , Purged Line, Cycled wafers, All Operations are Good, Uniformity Looks Good, Ok to use. From vilanova at snf.stanford.edu Thu Aug 25 09:13:55 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 25 Aug 2011 09:13:55 -0700 Subject: Comment svgcoat SNF 2011-08-24 22:59:43: spr220 resist not dispensing properly Message-ID: 1) Send station Working Fine, The Small Waste container Under the machine was almost full . Emptied and test Operation, Ok. 2) Thick Resist (220-7) Bottle was totally empty and someone Just turned Off the Alarm Instead of replacing it with a fresh One Therefore Uniformity was BAD, Replaced Bottle , Purged Line, Cycled wafers, All Operations are Good, Uniformity Looks Good, Ok to use. From vilanova at snf.stanford.edu Thu Aug 25 09:14:02 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 25 Aug 2011 09:14:02 -0700 Subject: Problem svgcoat SNF 2011-08-24 23:01:10: spr220 resist line appears to be out of resist Message-ID: 1) Send station Working Fine, The Small Waste container Under the machine was almost full . Emptied and test Operation, Ok. 2) Thick Resist (220-7) Bottle was totally empty and someone Just turned Off the Alarm Instead of replacing it with a fresh One Therefore Uniformity was BAD, Replaced Bottle , Purged Line, Cycled wafers, All Operations are Good, Uniformity Looks Good, Ok to use.