Problem svgcoat SNF 2011-08-03 17:37:55: SPR-220-7 7um has streaks and particles

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Aug 4 09:24:56 PDT 2011


Checked and adjusted suckback amount and rate. Cleaned the nozzle . Purged resist line. Tested standard 7.0um process on clean bare silicon wafers. Looks good.




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