Shutdown svgcoat SNF 2011-08-04 22:02:45: dropped 2 pieces inside spincoater chamber

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Aug 5 09:26:35 PDT 2011


Retrieved users 2 quartz substrates from the coater bowl. Set pieces aside in small  quartz beaker. Cleaned coater bowl. Tested track operation- All working normally.




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