Comment svgcoat SNF 2011-08-24 22:59:43: spr220 resist not dispensing properly

cktee at snf.stanford.edu cktee at snf.stanford.edu
Wed Aug 24 22:59:43 PDT 2011


Running program 6 with 7um SPR220-3 resist don't give uniform coat. The line appears to be running out of the resist. please help.




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