Problem svgcoat SNF 2011-08-24 22:08:10: send station does not move
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Thu Aug 25 09:13:31 PDT 2011
1) Send station Working Fine, The Small Waste container Under
the machine was almost full . Emptied and test Operation, Ok.
2) Thick Resist (220-7) Bottle was totally empty and someone Just
turned Off the Alarm Instead of replacing it with a fresh One Therefore
Uniformity was BAD, Replaced Bottle , Purged Line, Cycled wafers, All Operations are Good, Uniformity Looks Good, Ok to use.
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