Comment svgcoat SNF 2011-08-24 22:59:43: spr220 resist not dispensing properly

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Aug 25 09:13:55 PDT 2011


1) Send station Working Fine, The Small Waste container Under
the machine was  almost full . Emptied and test Operation, Ok.
2)  Thick Resist (220-7) Bottle was totally empty and someone Just
turned Off the Alarm Instead of replacing it with a fresh One Therefore
Uniformity was BAD, Replaced Bottle , Purged Line, Cycled wafers, All Operations are Good, Uniformity Looks Good, Ok to use. 




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