From vilanova at snf.stanford.edu Thu Dec 1 09:39:56 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Dec 2011 09:39:56 -0800 Subject: Comment svgcoat SNF 2011-12-01 09:39:55: cleaned catch cup belts hotplate and dummy wafers Message-ID: cleaned catch cup belts hotplate and dummy wafers From vilanova at snf.stanford.edu Fri Dec 9 08:16:08 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Dec 2011 08:16:08 -0800 Subject: Comment svgcoat SNF 2011-12-09 08:16:07: cleaned catch cup dummy wafers transfer Belts hotplate Message-ID: cleaned catch cup dummy wafers transfer Belts hotplate and chuck , system tested All operations are Ok. From yiwu at snf.stanford.edu Sat Dec 10 18:09:25 2011 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Sat, 10 Dec 2011 18:09:25 -0800 Subject: Comment svgcoat SNF 2011-12-10 18:09:24: cooling plate not working Message-ID: expected to come to normal when cooling water back. Use with caution. From vilanova at snf.stanford.edu Mon Dec 12 08:05:35 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Dec 2011 08:05:35 -0800 Subject: Comment svgcoat SNF 2011-12-12 08:05:35: cleaned up system and dummy wafers Message-ID: cleaned up system and dummy wafers From gsosa at snf.stanford.edu Tue Dec 13 13:01:03 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 13 Dec 2011 13:01:03 -0800 Subject: Shutdown svgcoat SNF 2011-12-13 13:01:03: Shutdown for Renovation Message-ID: