Problem svgcoat SNF 2011-02-06 14:54:38:

vilanova at vilanova at
Mon Feb 7 08:42:09 PST 2011

Lubricated All the HPO spindle post bake and indexers rails
cleaned catch cup hotplates chuck , cycled  and cleaned dummy wafers ( 23 each  Twice ) Rails are not getting stuck, ok to use. 

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