From gsosa at snf.stanford.edu Mon Jan 3 14:44:40 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 3 Jan 2011 14:44:40 -0800 Subject: Shutdown svgcoat SNF 2011-01-03 14:44:40: Computer Problems Message-ID: Recipe manager PC out for repair From gsosa at snf.stanford.edu Tue Jan 4 15:51:33 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 4 Jan 2011 15:51:33 -0800 Subject: Comment svgcoat SNF 2011-01-04 15:51:33: Track Status 1/4 Message-ID: The system computer is still being repaired by IT department. From gsosa at snf.stanford.edu Thu Jan 6 16:20:24 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 6 Jan 2011 16:20:24 -0800 Subject: Comment svgcoat SNF 2011-01-06 16:20:23: Track Status 1/6 Message-ID: Repaired R/M computer to be returned tomorrow morning(1/7). Will re-install computer and test all computer and track functions. Will also do track thickness quals. From gsosa at snf.stanford.edu Fri Jan 7 13:55:26 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 7 Jan 2011 13:55:26 -0800 Subject: Shutdown svgcoat SNF 2011-01-03 14:44:40: Computer Problems Message-ID: Re-installed Recipe Manager computer. Verified system operation- All OK. Qualified 3612, 220-7 and 220-3 resists. Data to follow. Created new recipes for 220-3 resist for 3.0 and 4.0 micron thickness From gsosa at snf.stanford.edu Fri Jan 7 13:56:00 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 7 Jan 2011 13:56:00 -0800 Subject: Comment svgcoat SNF 2011-01-04 15:51:33: Track Status 1/4 Message-ID: Re-installed Recipe Manager computer. Verified system operation- All OK. Qualified 3612, 220-7 and 220-3 resists. Data to follow. Created new recipes for 220-3 resist for 3.0 and 4.0 micron thickness From gsosa at snf.stanford.edu Fri Jan 7 13:56:09 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 7 Jan 2011 13:56:09 -0800 Subject: Comment svgcoat SNF 2011-01-06 16:20:23: Track Status 1/6 Message-ID: Re-installed Recipe Manager computer. Verified system operation- All OK. Qualified 3612, 220-7 and 220-3 resists. Data to follow. Created new recipes for 220-3 resist for 3.0 and 4.0 micron thickness From gsosa at snf.stanford.edu Fri Jan 7 14:52:07 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 7 Jan 2011 14:52:07 -0800 Subject: Comment svgcoat SNF 2011-01-07 14:52:06: Thickness results 1/7 Message-ID: 3612 Resist- 1.0 Micron Target: 10029 A Mean, 21 A Std Dev 1.6 Micron Target: 16637 A Mean, 5 A Std Dev 220-7 Resist- 7.0 Micron Target: 71687 A Mean, 20 A Std Dev 220-3 Resist- 3.0 Micron Target: 29962 A Mean, 35 A Std Dev (Spin Spd: 2500RPM) 4.0 Micron Target: 40261 A Mean, 51 A Std Dev (Spin Spd: 1400RPM) From gsosa at snf.stanford.edu Fri Jan 7 16:20:31 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 7 Jan 2011 16:20:31 -0800 Subject: Shutdown svgcoat SNF 2011-01-07 16:20:28: Track Down Message-ID: We decide to leave the track down over the weekend so that on Monday, we can spend some additional time setting up the track and doing some additional testing. The 220-3 coatings are showing an artifact pattern that may be related to exhaust. Adjusting for 220-3 may impact 220-7 and 3612 resists. We do not want to risk users having problems over the weekend. Sorry for the inconvenience. The Litho Team From shott at snf.stanford.edu Sat Jan 8 13:20:41 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 8 Jan 2011 13:20:41 -0800 Subject: Shutdown svgcoat SNF 2011-01-07 16:20:28: Track Down Message-ID: Temporarily clearing the shutdown for an manual run. Will be shutdown shortly. John From shott at snf.stanford.edu Sat Jan 8 20:42:50 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 8 Jan 2011 20:42:50 -0800 Subject: Shutdown svgcoat SNF 2011-01-08 20:42:49: Return to shutdown ... Message-ID: Returning to shutdown after manual coating operations. John From gsosa at snf.stanford.edu Mon Jan 10 15:50:37 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 10 Jan 2011 15:50:37 -0800 Subject: Shutdown svgcoat SNF 2011-01-08 20:42:49: Return to shutdown ... Message-ID: Re-adjusted main duct exhaust which feeds both tracks to 1000 FPM. Re-adjusted track exhaust on both tracks locally with butterfly valve. Adjusted each track to 700 FPM. Purged 3612 resist and ran test wafers. 3612 1.0 and 1.6 micron looks good. 220-3 and 220-7 still need more work. Will continue tomorrow. -3612 test results- 1.6um Target: Mean: 16568 A, Std Dev: 55 A 1.0um Target- Mean: 10063 A, Std Dev 18 A Track released for 3612 resist processing only From ludwig at snf.stanford.edu Tue Jan 11 13:37:30 2011 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Tue, 11 Jan 2011 13:37:30 -0800 Subject: Problem svgcoat SNF 2011-01-11 13:37:28: transfer from Chill plate to receiver Message-ID: does not work the program is : MD 5k, 2mmEBR. 60sec bake From gsosa at snf.stanford.edu Tue Jan 11 15:34:53 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 11 Jan 2011 15:34:53 -0800 Subject: Comment svgcoat SNF 2011-01-11 15:34:53: Important Notice 1/11 Message-ID: Disabled all 220-3 and 220-7 resist programs until we can test them out and bring them back online. Track is released for all 3612 resist programs and various special application programs such as EBR only, Manual dispense programs and programs to support the spraycoater. From gsosa at snf.stanford.edu Wed Jan 12 15:16:25 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 Jan 2011 15:16:25 -0800 Subject: Comment svgcoat SNF 2011-01-12 15:16:25: 220-3 3.0um released Message-ID: 220-3 3.0 micron resist programs( with and without EBR) released for use.. Thickness test looks good. Much improvement but may get an intermittant wafer with slight poor spin. Please check wafers and report any problems. Still working on 220-3 4.0 micron programs and 220-7 process. From gsosa at snf.stanford.edu Thu Jan 13 15:43:11 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Jan 2011 15:43:11 -0800 Subject: Comment svgcoat SNF 2011-01-13 15:43:11: 220-3 4.0um released Message-ID: 220-3 4.0 micron process released. Thickness Data 4.0 Target- Mean 40636 A, Std Dev 88 A From gsosa at snf.stanford.edu Thu Jan 13 15:49:37 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 13 Jan 2011 15:49:37 -0800 Subject: Comment svgcoat SNF 2011-01-13 15:49:37: 220-7 Update 1/13 Message-ID: 220-7 7.0 micron process released for non- critical layers. Still minor defects of 1 to 3 per wafer but some improvement. Continue to follow cleaning procedures and process a few dummy wafers. Thickness Results- Target 7.0 Microns- Mean 72711 A, Std Dev 35 A 220-7 10.0 Micron still needs work. If using for coverage only, please check with clean dummy//test wafers first and use your best judgement. Please report and problems in Coral . We will continue to work on the thick resist process. From fpurkl at snf.stanford.edu Mon Jan 17 10:54:18 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Mon, 17 Jan 2011 10:54:18 -0800 Subject: Problem svgcoat SNF 2011-01-17 10:54:17: hot plate carriage doesn't move Message-ID: hot plate carriage doesn't move out of the way to let wafer onto the hotplate. Slight push helps it to move. error message on PC: HPO/VP CARRIAGE OUT? From gsosa at snf.stanford.edu Tue Jan 18 12:57:24 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 18 Jan 2011 12:57:24 -0800 Subject: Problem svgcoat SNF 2011-01-17 10:54:17: hot plate carriage doesn't move Message-ID: Guide bar for carriage rail had slipped out causing tension and friction when moving in and out. Re-installed the guide bar and tightened down set screws. Cycled wafers through track to verify proper HPO operation- All OK. From karthikv at snf.stanford.edu Wed Jan 19 00:13:12 2011 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Wed, 19 Jan 2011 00:13:12 -0800 Subject: Problem svgcoat SNF 2011-01-19 00:13:11: EBR alarm Message-ID: EBR alarm for track1 went off. From calarrudo at snf.stanford.edu Wed Jan 19 00:52:19 2011 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Wed, 19 Jan 2011 00:52:19 -0800 Subject: Problem svgcoat SNF 2011-01-19 00:52:18: No EBR Message-ID: System alarmed for track 1 no EBR. From gsosa at snf.stanford.edu Wed Jan 19 09:16:24 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 19 Jan 2011 09:16:24 -0800 Subject: Problem svgcoat SNF 2011-01-19 00:13:11: EBR alarm Message-ID: Re-filled the EBR canister. Tested track operation- OK From gsosa at snf.stanford.edu Wed Jan 19 09:16:29 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 19 Jan 2011 09:16:29 -0800 Subject: Problem svgcoat SNF 2011-01-19 00:52:18: No EBR Message-ID: Re-filled the EBR canister. Tested track operation- OK From mahnaz at snf.stanford.edu Wed Jan 19 11:34:47 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 19 Jan 2011 11:34:47 -0800 Subject: Problem svgcoat SNF 2011-01-19 11:34:45: 220-7 is not that uniform Message-ID: is good for non critical layers I have asked Gary to drop the dispense rate a little to see what impact that will have on the spin uniformity. From dongrip at snf.stanford.edu Mon Jan 24 20:40:46 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Mon, 24 Jan 2011 20:40:46 -0800 Subject: Problem svgcoat SNF 2011-01-24 20:40:45: hotplate is very dirty with PR before I used Message-ID: From gsosa at snf.stanford.edu Wed Jan 26 10:01:00 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 26 Jan 2011 10:01:00 -0800 Subject: Problem svgcoat SNF 2011-01-24 20:40:45: hotplate is very dirty with PR before I used Message-ID: cleaned the hotplate on 1/25 in the am. From jasonlin at snf.stanford.edu Wed Jan 26 12:21:26 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Wed, 26 Jan 2011 12:21:26 -0800 Subject: Problem svgcoat SNF 2011-01-26 12:21:26: Hot Plate Temperature high Message-ID: It started out at 90, but halfway through coating my wafers, it went to about 120 and alarmed. After resetting track, it seems to be back to 90 degrees now. From wslee at snf.stanford.edu Wed Jan 26 21:16:50 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Wed, 26 Jan 2011 21:16:50 -0800 Subject: Problem svgcoat SNF 2011-01-26 21:16:50: hot plate dirty Message-ID: there is a nasty ring of resist on the hot plate From mahnaz at snf.stanford.edu Thu Jan 27 13:14:42 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 27 Jan 2011 13:14:42 -0800 Subject: Comment svgcoat SNF 2010-11-01 09:00:30: cleaned catch cup hotplates and test wafers. Message-ID: From mahnaz at snf.stanford.edu Thu Jan 27 13:14:51 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 27 Jan 2011 13:14:51 -0800 Subject: Comment svgcoat SNF 2010-11-22 08:56:28: cleaned dummy wafers and catch cup Message-ID: From mahnaz at snf.stanford.edu Thu Jan 27 13:15:00 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 27 Jan 2011 13:15:00 -0800 Subject: Comment svgcoat SNF 2011-01-07 14:52:06: Thickness results 1/7 Message-ID: From mahnaz at snf.stanford.edu Thu Jan 27 13:15:26 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 27 Jan 2011 13:15:26 -0800 Subject: Problem svgcoat SNF 2011-01-11 13:37:28: transfer from Chill plate to receiver Message-ID: taken care of. From mahnaz at snf.stanford.edu Thu Jan 27 13:16:08 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 27 Jan 2011 13:16:08 -0800 Subject: Problem svgcoat SNF 2011-01-26 21:16:50: hot plate dirty Message-ID: taken care From mahnaz at snf.stanford.edu Thu Jan 27 13:17:39 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 27 Jan 2011 13:17:39 -0800 Subject: Problem svgcoat SNF 2010-11-02 15:21:08: 220-7nonuniform thickness Message-ID: we worked on it but still not good enought for crtical layer. Is noted. From mahnaz at snf.stanford.edu Thu Jan 27 13:18:00 2011 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 27 Jan 2011 13:18:00 -0800 Subject: Problem svgcoat SNF 2010-11-02 10:00:58: 220-7 very bad uniformity Message-ID: noted From jasmine at snf.stanford.edu Fri Jan 28 19:44:08 2011 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Fri, 28 Jan 2011 19:44:08 -0800 Subject: Comment svgcoat SNF 2011-01-28 19:44:08: Message-ID: The 7um coating is awful. The series of coatings change from wafer to wafer. Some wafers can look average while some are atrocious with streaks all over the wafer. It also looks like there are bubbles on the coated wafer. This program needs to be looked at thoroughly and be consistant. This step is critical for me as my next step is DRIE and require my large devices to be protected.